Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665166 | Plasma processing apparatus | Youichi Deguchi, Yoichi Ueda, Mitsuaki Komino | 1997-09-09 |
| 5665167 | Plasma treatment apparatus having a workpiece-side electrode grounding circuit | Yoichi Deguchi, Shiro Koyama, Kenji Ishikawa | 1997-09-09 |