Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702529 | Method of making doped semiconductor film having uniform impurity concentration on semiconductor substrate and apparatus for making the same | Yuuichi Mikata, Katsuya Okumura | 1997-12-30 |
| 5612236 | Method of forming a silicon semiconductor device using doping during deposition of polysilicon | Yuuichi Mikata, Toshiro Usami | 1997-03-18 |