Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702529 | Method of making doped semiconductor film having uniform impurity concentration on semiconductor substrate and apparatus for making the same | Katsunori Ishihara, Katsuya Okumura | 1997-12-30 |
| 5702531 | Apparatus for forming a thin film | — | 1997-12-30 |
| 5637153 | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus | Reiji Niino, Yoshiyuki Fujita, Hideki Lee, Yasuo Imamura, Toshiharu Nishimura +4 more | 1997-06-10 |
| 5612236 | Method of forming a silicon semiconductor device using doping during deposition of polysilicon | Toshiro Usami, Katsunori Ishihara | 1997-03-18 |