Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5647945 | Vacuum processing apparatus | Kimihiro Matsuse, Hatsuo Osada, Sumi Tanaka | 1997-07-15 |
| 5637153 | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus | Reiji Niino, Yoshiyuki Fujita, Yasuo Imamura, Toshiharu Nishimura, Yuuichi Mikata +4 more | 1997-06-10 |
| 5616208 | Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus | — | 1997-04-01 |