Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677235 | Method for forming silicon film | Kazuhide Hasebe | 1997-10-14 |
| 5654230 | Method of forming doped film | Shinichi Jintate, Yoshihiko Okamoto, Atsushi Hosaka | 1997-08-05 |
| 5637153 | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus | Reiji Niino, Yoshiyuki Fujita, Hideki Lee, Yasuo Imamura, Yuuichi Mikata +4 more | 1997-06-10 |
| 5622566 | Film-forming apparatus | Atsushi Hosaka, Mitsuaki Iwashita | 1997-04-22 |