Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5691115 | Exposure method, aligner, and method of manufacturing semiconductor integrated circuit devices | Tsuneo Terasawa, Akira Imai, Norio Hasegawa, Shinji Okazaki | 1997-11-25 |
| 5667941 | Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process | Noboru Moriuchi | 1997-09-16 |
| 5654230 | Method of forming doped film | Shinichi Jintate, Toshiharu Nishimura, Atsushi Hosaka | 1997-08-05 |
| 5643698 | Mask for manufacturing semiconductor device and method of manufacture thereof | — | 1997-07-01 |
| 5641715 | Semiconductor IC device fabricating method | — | 1997-06-24 |
| 5631108 | Mask for manufacturing semiconductor device and method of manufacture thereof | — | 1997-05-20 |