Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700601 | Photomask, manufacture of photomask, formation of pattern, manufacture of semiconductor device, and mask pattern design system | Tsuneo Terasawa, Hiroshi Fukuda, Katsuya Hayano, Akira Imai, Akemi Moniwa +1 more | 1997-12-23 |
| 5691115 | Exposure method, aligner, and method of manufacturing semiconductor integrated circuit devices | Yoshihiko Okamoto, Tsuneo Terasawa, Akira Imai, Shinji Okazaki | 1997-11-25 |
| 5677898 | Disc cartridge container and apparatus having a plurality of cartridges arranged for simultaneous shutter opening closing | Masayasu Itoh, Hideaki Kawashimo | 1997-10-14 |
| 5656397 | Mask having a phase shifter and method of manufacturing same | Akira Imai, Hiroshi Fukuda, Toshihiko Tanaka | 1997-08-12 |
| 5656400 | Photomask and pattern forming method employing the same | Fumio Murai, Katsuya Hayano | 1997-08-12 |