Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5660744 | Plasma generating apparatus and surface processing apparatus | Keiji Horioka, Haruo Okano, Katsuya Okumura, Isahiro Hasegawa, Masaki Narita | 1997-08-26 |
| 5661052 | Method of fabricating semiconductor device having low-resistance gate electrode and diffusion layers | Ken Inoue, Hirohito Watanabe, Ichirou Honma | 1997-08-26 |
| 5622888 | Method of manufacturing a semiconductor device | Satoshi Kamiyama | 1997-04-22 |
| 5591486 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano, Sadahisa Noguchi | 1997-01-07 |