Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5591486 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano, Makoto Sekine | 1997-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5591486 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano, Makoto Sekine | 1997-01-07 |