Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639699 | Focused ion beam deposition using TMCTS | Hiroko Nakamura, Haruki Komano, Keiji Horioka, Mitsuyo Kariya, Soichi Inoue +7 more | 1997-06-17 |
| 5591970 | Charged beam apparatus | Haruki Komano, Akira Matsuura, Hiroko Nakamura | 1997-01-07 |