Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5660956 | Reticle and method of fabricating reticle | Yoko Tomofuji, Makoto Nakase, Takashi Sato, Hiroaki Hazama, Shinichi Ito | 1997-08-26 |
| 5639699 | Focused ion beam deposition using TMCTS | Hiroko Nakamura, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya, Soichi Inoue +7 more | 1997-06-17 |
| 5595844 | Method of exposing light in a method of fabricating a reticle | Yoko Tomofuji, Makoto Nakase, Takashi Sato, Hiroaki Hazama, Shinichi Ito | 1997-01-21 |
| 5591970 | Charged beam apparatus | Akira Matsuura, Hiroko Nakamura, Kazuyoshi Sugihara | 1997-01-07 |