Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5660956 | Reticle and method of fabricating reticle | Yoko Tomofuji, Makoto Nakase, Takashi Sato, Haruki Komano, Shinichi Ito | 1997-08-26 |
| 5629115 | Exposure mask and method and apparatus for manufacturing the same | Kenji Kawano, Shinichi Ito, Iwao Higashikawa, Masamitsu Itoh, Takashi Kamo +1 more | 1997-05-13 |
| 5595844 | Method of exposing light in a method of fabricating a reticle | Yoko Tomofuji, Makoto Nakase, Takashi Sato, Haruki Komano, Shinichi Ito | 1997-01-21 |