Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629115 | Exposure mask and method and apparatus for manufacturing the same | Kenji Kawano, Shinichi Ito, Iwao Higashikawa, Takashi Kamo, Hiroaki Hazama +1 more | 1997-05-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629115 | Exposure mask and method and apparatus for manufacturing the same | Kenji Kawano, Shinichi Ito, Iwao Higashikawa, Takashi Kamo, Hiroaki Hazama +1 more | 1997-05-13 |