Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5686209 | Phase shifting mask and method of forming a pattern using the same | Takayuki Iwamatsu, Hideya Miyazaki, Shinichi Ito, Soichi Inoue, Hiroyuki Sato +2 more | 1997-11-11 |
| 5629115 | Exposure mask and method and apparatus for manufacturing the same | Shinichi Ito, Iwao Higashikawa, Masamitsu Itoh, Takashi Kamo, Hiroaki Hazama +1 more | 1997-05-13 |
| 5609977 | Reflection phase shifting mask and method of forming a pattern using the same | Takayuki Iwamatsu, Hideya Miyazaki, Shinichi Ito, Soichi Inoue, Hiroyuki Sato +2 more | 1997-03-11 |