Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683945 | Uniform trench fill recess by means of isotropic etching | Klaus Penner | 1997-11-04 |
| 5667622 | In-situ wafer temperature control apparatus for single wafer tools | Isahiro Hasegawa, Karl Paul Muller, Bernhard L. Poschenriedes, Theodore G. van Kessel | 1997-09-16 |
| 5636258 | In-situ temperature measurement using X-ray diffraction | Katsuya Okumura, James G. Ryan, Gregory Brian Stephenson | 1997-06-03 |