Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5691540 | Assembly for measuring a trench depth parameter of a workpiece | Scott D. Halle, Philip Charles Danby Hobbs, Tadashi Mitsui, Hemantha K. Wickramasinghe | 1997-11-25 |
| 5667622 | In-situ wafer temperature control apparatus for single wafer tools | Isahiro Hasegawa, Karl Paul Muller, Bernhard L. Poschenriedes, Hans-Joerg Timme | 1997-09-16 |
| 5640242 | Assembly and method for making in process thin film thickness measurments | Martin P. O'Boyle, John Charles Panner, Thomas E. Sandwick, Hemantha K. Wickramasinghe | 1997-06-17 |
| 5638176 | Inexpensive interferometric eye tracking system | Philip Charles Danby Hobbs | 1997-06-10 |