Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5640242 | Assembly and method for making in process thin film thickness measurments | Martin P. O'Boyle, John Charles Panner, Theodore G. van Kessel, Hemantha K. Wickramasinghe | 1997-06-17 |