Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679610 | Method of planarizing a semiconductor workpiece surface | Katsuya Okumura | 1997-10-21 |
| 5658389 | Thin film forming method and apparatus | Haruo Okano, Tokuhisa Ohiwa | 1997-08-19 |