Issued Patents All Time
Showing 26–50 of 216 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847341 | Plasma processing apparatus | Chishio Koshimizu, Satoshi Tanaka, Toru Ito | 2020-11-24 |
| 10837409 | Purge system malfunction diagnosis device | Daisuke Kugo, Masahiro Ono, Kazunori Takahashi | 2020-11-17 |
| 10832892 | Antenna, plasma processing device and plasma processing method | Kazuki Takahashi, Yuki KAWADA, Takahiro Senda, Koji Koyama, Shohei Fukano +3 more | 2020-11-10 |
| 10804072 | Plasma processing apparatus | Chishio Koshimizu, Satoshi Tanaka, Toru Ito | 2020-10-13 |
| 10774790 | Purge system malfunction diagnosis device | Daisuke Kugo, Atsushi Kaneko, Yoshitaka Ono | 2020-09-15 |
| 10768845 | Storage device and data output method for storage device | — | 2020-09-08 |
| 10751832 | Optical non-destructive inspection method and optical non-destructive inspection apparatus | Ryota Umezawa, Daisuke Kuroda, Hiroshi Ohara | 2020-08-25 |
| 10679826 | Microwave control method | Jun Yoshikawa, Kazushi Kaneko | 2020-06-09 |
| 10663815 | Inspection method and inspection system for wiring path of substrate | — | 2020-05-26 |
| 10665428 | Plasma processing apparatus | Michitaka Aita | 2020-05-26 |
| 10633011 | Carriage | — | 2020-04-28 |
| 10622197 | Plasma processing apparatus and plasma processing method | Shinji Kubota, Takashi Dokan, Koji Koyama | 2020-04-14 |
| 10600676 | Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device | Keiji Ishibashi, Akihiro Hachigo, Yuki Hiromura, Seiji Nakahata, Fumitake Nakanishi +6 more | 2020-03-24 |
| 10553402 | Antenna device and plasma processing apparatus | Yuki KAWADA, Koji Koyama, Ayako Ito, Takahiro Senda | 2020-02-04 |
| 10546727 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2020-01-28 |
| 10529596 | Capacitive coupling plasma processing apparatus and method for using the same | Chishio Koshimizu, Akira Koshiishi | 2020-01-07 |
| 10529539 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +10 more | 2020-01-07 |
| 10504698 | Plasma processing apparatus | Masayuki Kohno, Ryou Son, Jun Yoshikawa, Michitaka Aita, Ippei Shimizu +4 more | 2019-12-10 |
| 10438819 | Plasma processing apparatus and plasma processing method | — | 2019-10-08 |
| 10312057 | Plasma processing apparatus | Masayuki Kohno, Yusuke Yoshida, Ippei Shimizu, Naoki Mihara, Jun Yoshikawa +3 more | 2019-06-04 |
| 10224220 | Plasma processing apparatus and plasma etching apparatus | Toshihisa Ozu, Takashi Tsukamoto, Kazuto Takai | 2019-03-05 |
| 10186451 | Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device | Akihiro Hachigo, Keiji Ishibashi | 2019-01-22 |
| 10167453 | Saccharide oxidase, and production method for same and use of same | Miho Nagaya, Akiko Sugita, Masamichi Okada | 2019-01-01 |
| 10144040 | Plasma processing method and plasma processing apparatus | Wataru Yoshikawa | 2018-12-04 |
| 10083819 | Antenna and plasma processing apparatus | Koji Koyama, Jun Yoshikawa | 2018-09-25 |