SF

Shohei Fukano

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Rifu, JP: #1,311 of 2,101 inventorsTop 65%
Overall (All Time): #2,826,230 of 4,157,543Top 70%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10832892 Antenna, plasma processing device and plasma processing method Kazuki Takahashi, Yuki KAWADA, Naoki Matsumoto, Takahiro Senda, Koji Koyama +3 more 2020-11-10