Issued Patents All Time
Showing 1–25 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094537 | Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device | Akihiro Hachigo, Yuki Hiromura, Naoki Matsumoto, Seiji Nakahata, Fumitake Nakanishi +6 more | 2021-08-17 |
| 10844470 | Epitaxial film forming method, sputtering apparatus, manufacturing method of semiconductor light-emitting element, semiconductor light-emitting element, and illumination device | Yoshiaki DAIGO | 2020-11-24 |
| 10600676 | Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device | Akihiro Hachigo, Yuki Hiromura, Naoki Matsumoto, Seiji Nakahata, Fumitake Nakanishi +6 more | 2020-03-24 |
| 10186451 | Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device | Akihiro Hachigo, Naoki Matsumoto | 2019-01-22 |
| 10113248 | Group III nitride crystal substrate, epilayer-containing group III nitride crystal substrate, semiconductor device and method of manufacturing the same | Yusuke Yoshizumi, Shugo Minobe | 2018-10-30 |
| 10078059 | Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same | Tokiko Kaji, Seiji Nakahata, Takayuki Nishiura | 2018-09-18 |
| 9923063 | Group III nitride composite substrate and method for manufacturing the same, laminated group III nitride composite substrate, and group III nitride semiconductor device and method for manufacturing the same | Takuya Yanagisawa, Koji Uematsu, Yuki Seki, Yoshiyuki Yamamoto | 2018-03-20 |
| 9917004 | Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device | Akihiro Hachigo, Yuki Hiromura, Naoki Matsumoto, Seiji Nakahata, Fumitake Nakanishi +6 more | 2018-03-13 |
| 9728612 | Silicon carbide substrate, semiconductor device and methods for manufacturing them | — | 2017-08-08 |
| 9722028 | Silicon carbide substrate, semiconductor device, and methods for manufacturing them | — | 2017-08-01 |
| 9708735 | Group III nitride crystal substrate, epilayer-containing group III nitride crystal substrate, semiconductor device and method of manufacturing the same | Yusuke Yoshizumi, Shugo Minobe | 2017-07-18 |
| 9570540 | Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same | Tokiko Kaji, Seiji Nakahata, Takayuki Nishiura | 2017-02-14 |
| 9499925 | Group III nitride crystal substrate, epilayer-containing group III nitride crystal substrate, semiconductor device and method of manufacturing the same | Yusuke Yoshizumi | 2016-11-22 |
| 9490132 | Substrate, semiconductor device, and method of manufacturing the same | — | 2016-11-08 |
| 9484416 | Silicon carbide substrate, semiconductor device and methods for manufacturing them | — | 2016-11-01 |
| 9437690 | Silicon carbide substrate, semiconductor device, and methods for manufacturing them | — | 2016-09-06 |
| 9324814 | Silicon carbide single-crystal substrate | Kyoko Okita | 2016-04-26 |
| 9318563 | Silicon carbide single-crystal substrate | Kyoko Okita | 2016-04-19 |
| 9312165 | Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device | Akihiro Hachigo, Naoki Matsumoto | 2016-04-12 |
| 9312340 | Group III nitride composite substrate and method for manufacturing the same, laminated group III nitride composite substrate, and group III nitride semiconductor device and method for manufacturing the same | Makoto Kiyama, Akihiro Hachigo, Naoki Matsumoto, Fumitake Nakanishi | 2016-04-12 |
| 9299890 | III nitride semiconductor substrate, epitaxial substrate, and semiconductor device | — | 2016-03-29 |
| 9252322 | Epitaxial film forming method, vacuum processing apparatus, semiconductor light emitting element manufacturing method, semiconductor light emitting element, and illuminating device | Yoshiaki DAIGO | 2016-02-02 |
| 9184246 | Silicon carbide substrate, semiconductor device, and methods for manufacturing them | — | 2015-11-10 |
| 9136337 | Group III nitride composite substrate and method for manufacturing the same, laminated group III nitride composite substrate, and group III nitride semiconductor device and method for manufacturing the same | Akihiro Hachigo, Yuki Hiromura, Naoki Matsumoto, Seiji Nakahata, Fumitake Nakanishi +2 more | 2015-09-15 |
| 9117758 | Substrate, semiconductor device, and method of manufacturing the same | — | 2015-08-25 |