Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7663185 | FIN-FET device structure formed employing bulk semiconductor substrate | Kuang-Hsin Chen, Hsun-Chih Tsao, Jhi-Cherng Lu, Chuan-Ping Hou, Hung-Wei Chen +1 more | 2010-02-16 |
| 7598176 | Method for photoresist stripping and treatment of low-k dielectric material | Jang-Shiang Tsai, Yi-Nien Su, Chung-Chi Ko, Jyu-Horng Shieh, Hun-Jan Tao | 2009-10-06 |
| 7531399 | Semiconductor devices and methods with bilayer dielectrics | Fong-Yu Yen, Cheng-Lung Hung, Vencent Chang, Yong-Tian Hou, Jin Ying +1 more | 2009-05-12 |
| 7400401 | Measuring low dielectric constant film properties during processing | Jang-Shiang Tsai, Baw-Ching Perng, Ju-Wang Hsu, Jyu-Horng Shieh, Yi-Nien Su +1 more | 2008-07-15 |
| 7378713 | Semiconductor devices with dual-metal gate structures and fabrication methods thereof | Fong-Yu Yen, Yi-Shien Mor, Huan-Just Lin, Ying Jin, Hun-Jan Tao | 2008-05-27 |
| 7373941 | Wet cleaning cavitation system and method to remove particulate wafer contamination | Chun-Li Chou, Hun-Jan Tao | 2008-05-20 |
| 7208331 | Methods and structures for critical dimension and profile measurement | Jyu-Horng Shieh, Wen-Chih Chiou, Baw-Ching Perng, Hun-Jan Tao, Chia-Jen Chen | 2007-04-24 |
| 7122484 | Process for removing organic materials during formation of a metal interconnect | Baw-Ching Perng, Yi-Chen Huang, Jun-Lung Huang, Bor-Wen Chan, Hsin-Ching Shih +2 more | 2006-10-17 |
| 7074727 | Process for improving dielectric properties in low-k organosilicate dielectric material | Jyu-Horng Shieh, Yung-Cheng Lu, Hun-Jan Tao, Yuan-Hung Chiu | 2006-07-11 |
| 7012027 | Zirconium oxide and hafnium oxide etching using halogen containing chemicals | Baw-Ching Perng, Yuan-Hung Chiu, Mei-Hui Sung | 2006-03-14 |
| 6969688 | Wet etchant composition and method for etching HfO2 and ZrO2 | Baw-Ching Perng, Fang Chen, Hun-Jan Tao, Yue-Ho Hsieh, Chih-Cheng Wang +1 more | 2005-11-29 |
| 6864193 | Aqueous cleaning composition containing copper-specific corrosion inhibitor | Chun-Li Chou, Hun-Jan Tao | 2005-03-08 |
| 6838381 | Methods for improving sheet resistance of silicide layer after removal of etch stop layer | Ming-Huan Tsai, Baw-Ching Perng, Ju-Wang Hsu, Yaun-Hung Chiu | 2005-01-04 |
| 6706640 | Metal silicide etch resistant plasma etch method | Ming-Huan Tsai, Ju-Wang Hsu, Hun-Jan Tao | 2004-03-16 |
| 6369256 | Self-reducible copper(II) source reagents for chemical vapor deposition of copper metal | Yun Chi, Tsung-Wu Lin, Chao-Shiuan Liu, Arthur Carty | 2002-04-09 |