Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7012027 | Zirconium oxide and hafnium oxide etching using halogen containing chemicals | Baw-Ching Perng, Yuan-Hung Chiu, Peng-Fu Hsu | 2006-03-14 |
| 6689695 | Multi-purpose composite mask for dual damascene patterning | Meng-Huei Lui | 2004-02-10 |
| 6647994 | Method of resist stripping over low-k dielectric material | Ming-Huei Lui | 2003-11-18 |
| 6582974 | Method for forming a dual damascene aperture while employing a peripherally localized intermediate etch stop layer | Lawrence Lui | 2003-06-24 |
| 6440838 | Dual damascene structure employing laminated intermediate etch stop layer | Ming-Huei Lui | 2002-08-27 |
| 6380090 | Protecting method applied to the semiconductor manufacturing process | Shih-Kuan Tai | 2002-04-30 |
| 6024802 | Vapor treatment process for reducing oxide depletion | Shih-Kuan Tai | 2000-02-15 |