Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6995085 | Underlayer protection for the dual damascene etching | Chia-Shia Tsai, Chao-Cheng Chen, Jen-Cheng Liu | 2006-02-07 |
| 6582974 | Method for forming a dual damascene aperture while employing a peripherally localized intermediate etch stop layer | Mei-Hui Sung | 2003-06-24 |
| 6391761 | Method to form dual damascene structures using a linear passivation | — | 2002-05-21 |