Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6995085 | Underlayer protection for the dual damascene etching | Lawrence Lui, Chao-Cheng Chen, Jen-Cheng Liu | 2006-02-07 |
| 6297168 | Edge defect inhibited trench etch plasma etch method | Jyu-Horng Shieh, Jen-Cheng Liu, Chao-Cheng Chen, Li-Chi Chao | 2001-10-02 |
| 6211063 | Method to fabricate self-aligned dual damascene structures | Jen-Cheng Liu | 2001-04-03 |