Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6309962 | Film stack and etching sequence for dual damascene | Chao-Cheng Chen, Jen-Cheng Liu, Min-Huei Lui, Chia-Shiung Tsai | 2001-10-30 |
| 6297168 | Edge defect inhibited trench etch plasma etch method | Jyu-Horng Shieh, Jen-Cheng Liu, Chao-Cheng Chen, Chia-Shia Tsai | 2001-10-02 |