Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7122484 | Process for removing organic materials during formation of a metal interconnect | Baw-Ching Perng, Yi-Chen Huang, Bor-Wen Chan, Peng-Fu Hsu, Hsin-Ching Shih +2 more | 2006-10-17 |
| 7042049 | Composite etching stop in semiconductor process integration | Lain-Jong Li, Tien-I Bao, Shwang-Ming Jeng, Syun-Ming Jang, Jeng-Cheng Liu | 2006-05-09 |
| 6884728 | Method for removing polymeric residue contamination on semiconductor feature sidewalls | Jen-Cheng Liu, Ching-Hui Ma, Yi-Chen Huang, Yin-Shen Chu, Hong-Ming Chen +1 more | 2005-04-26 |
| 6753260 | Composite etching stop in semiconductor process integration | Lain-Jong Li, Tien-I Bao, Shwang-Ming Jeng, Syun-Ming Jang, Jeng-Cheng Liu | 2004-06-22 |