Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7820553 | Prevention of trench photoresist scum | Chia-Piao Lee | 2010-10-26 |
| 6972258 | Method for selectively controlling damascene CD bias | Hung-Ming Chen | 2005-12-06 |
| 6884728 | Method for removing polymeric residue contamination on semiconductor feature sidewalls | Jun-Lung Huang, Jen-Cheng Liu, Ching-Hui Ma, Yi-Chen Huang, Hong-Ming Chen +1 more | 2005-04-26 |
| 6777334 | Method for protecting a wafer backside from etching damage | Le Der Shiu, Pin Chia Su | 2004-08-17 |