Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8133819 | Plasma etching carbonaceous layers with sulfur-based etchants | Judy Wang, Chang-Lin Hsieh, Bryan Liao, Jie Zhou, Hun Sang Kim | 2012-03-13 |
| 8048806 | Methods to avoid unstable plasma states during a process transition | Michael Kutney, Daniel J. Hoffman, Gerardo Delgadino, Ezra Robert Gold, Ashok Sinha +2 more | 2011-11-01 |
| 7838432 | Etch process with controlled critical dimension shrink | Judy Wang, Shin-Li Sung | 2010-11-23 |
| 7510976 | Dielectric plasma etch process with in-situ amorphous carbon mask with improved critical dimension and etch selectivity | Shing-Li Sung, Wonseok Lee, Judy Wang | 2009-03-31 |
| 7432210 | Process to open carbon based hardmask | Judy Wang, Shing-Li Sung, Bryan Pu | 2008-10-07 |
| 6812145 | Method of reducing plasma charging damage during dielectric etch process for dual damascene interconnect structures | — | 2004-11-02 |
| 6806101 | Ferroelectric capacitor plasma charging monitor | Guoqiang Xing, Stephen Roy Gilbert | 2004-10-19 |
| 6673636 | Method of real-time plasma charging voltage measurement on powered electrode with electrostatic chuck in plasma process chambers | — | 2004-01-06 |
| 6613666 | Method of reducing plasma charging damage during dielectric etch process for dual damascene interconnect structures | — | 2003-09-02 |
| 6614051 | Device for monitoring substrate charging and method of fabricating same | — | 2003-09-02 |
| 6576922 | Ferroelectric capacitor plasma charging monitor | Guoqiang Xing, Stephen Roy Gilbert | 2003-06-10 |
| 6554954 | Conductive collar surrounding semiconductor workpiece in plasma chamber | Ralph Straube | 2003-04-29 |
| 6548343 | Method of fabricating a ferroelectric memory cell | Scott R. Summerfelt, Theodore S. Moise, Guoqiang Xing, Luigi Colombo, Tomoyuki Sakoda +5 more | 2003-04-15 |
| 6485988 | Hydrogen-free contact etch for ferroelectric capacitor formation | Guoqiang Xing, Rahim Kavari, Scott R. Summerfelt, Tomoyuki Sakoda | 2002-11-26 |
| 6396118 | Conductive mesh bias connection for an array of elevated active pixel sensors | Jeremy Alfred Theil, Jane M. Lin, Min Cao, Gary W. Ray, Xin Sun | 2002-05-28 |
| 6281535 | Three-dimensional ferroelectric capacitor structure for nonvolatile random access memory cell | Gary W. Ray, Florence Eschbach | 2001-08-28 |
| 6270192 | Monolithic ink jet nozzle formed from an oxide and nitride composition | — | 2001-08-07 |
| 6215164 | Elevated image sensor array which includes isolation between uniquely shaped image sensors | Min Cao, Jeremy Alfred Theil, Gary W. Ray, Dietrich W. Vook | 2001-04-10 |
| 6154234 | Monolithic ink jet nozzle formed from an oxide and nitride composition | — | 2000-11-28 |
| 6114739 | Elevated pin diode active pixel sensor which includes a patterned doped semiconductor electrode | Jeremy Alfred Theil, Min Cao, Dietrich W. Vook, Frederick Perner, Xin Sun +4 more | 2000-09-05 |
| 6018187 | Elevated pin diode active pixel sensor including a unique interconnection structure | Jeremy Alfred Theil, Min Cao, Dietrich W. Vook, Frederick Perner, Xin Sun +1 more | 2000-01-25 |
| 5936261 | Elevated image sensor array which includes isolation between the image sensors and a unique interconnection | Jeremy Alfred Theil | 1999-08-10 |