Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7510976 | Dielectric plasma etch process with in-situ amorphous carbon mask with improved critical dimension and etch selectivity | Wonseok Lee, Judy Wang, Shawming Ma | 2009-03-31 |
| 7432210 | Process to open carbon based hardmask | Judy Wang, Shawming Ma, Bryan Pu | 2008-10-07 |
| 6346303 | Process for synthesizing one-dimensional nanosubstances by electron cyclotron resonance chemical vapor deposition | Han-Chang Shih, Shang-Hua Tsai | 2002-02-12 |