Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9710903 | System and method for detecting design and process defects on a wafer using process monitoring features | Christophe David Fouquet, Sergio Edelstein, Savitha Nanjangud, Carl Hess | 2017-07-18 |
| 8804137 | Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capability | DongSub Choi, Amir Widmann, Frank Laske, John Robinson | 2014-08-12 |
| 7904845 | Determining locations on a wafer to be reviewed during defect review | Christophe David Fouquet, Gordon Abbott, Ellis Chang | 2011-03-08 |
| 7646906 | Computer-implemented methods for detecting defects in reticle design data | Yalin Xiong, Lance Glasser, Carl Hess, Moshe E. Preil | 2010-01-12 |
| 7440093 | Apparatus and methods for providing selective defect sensitivity | Yalin Xiong, Sterling Watson | 2008-10-21 |
| 7303842 | Systems and methods for modifying a reticle's optical properties | Sterling Watson, Ady Levy, Chris Mack, Stanley Stokowski, Larry S. Zurbrick | 2007-12-04 |
| 7300729 | Method for monitoring a reticle | Sterling Watson, Ady Levy, Chris Mack, Stanley Stokowski | 2007-11-27 |
| 7300725 | Method for determining and correcting reticle variations | Sterling Watson, Ady Levy, Chris Mack, Stanley Stokowski | 2007-11-27 |
| 7297453 | Systems and methods for mitigating variances on a patterned wafer using a prediction model | Sterling Watson, Ady Levy, Chris Mack, Stanley Stokowski | 2007-11-20 |
| 7271891 | Apparatus and methods for providing selective defect sensitivity | Yalin Xiong, Sterling Watson | 2007-09-18 |
| 6844927 | Apparatus and methods for removing optical abberations during an optical inspection | Stan Stokowski | 2005-01-18 |
| 6731787 | System and method for determining reticle defect printability | Anthony Vacca, Thomas Vavul, Donald J. Parker, Sterling Watson, James Wiley | 2004-05-04 |
| 6381358 | System and method for determining reticle defect printability | Anthony Vacca, Thomas Vavul, Donald J. Parker, Sterling Watson, James Wiley | 2002-04-30 |
| 6076465 | System and method for determining reticle defect printability | Anthony Vacca, Thomas Vavul, Donald J. Parker, Sterling Watson, James Wiley | 2000-06-20 |
| 5737072 | Automated photomask inspection apparatus and method | David G. Emery, Mark J. Wihl, Tao-Yi Fu, Marek Zywno, Damon F. Kvamme +1 more | 1998-04-07 |
| 5563702 | Automated photomask inspection apparatus and method | David G. Emery, Mark J. Wihl, Tao-Yi Fu, Marek Zywno, Damon F. Kvamme +1 more | 1996-10-08 |
| 5023528 | Method of three-phase winding motor control of rotary motor-driven linear actuators, linear motor-actuated carriages, and similar systems, and apparatus for practicing the same | Alexander H. Slocum | 1991-06-11 |