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Method and system for scanning a code on a transparent part |
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Tab arrangement for retaining support elements of substrate support |
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| 12362211 |
Detecting defects of semiconductor manufacturing assemblies |
Chih-Yang Chang, Shannon WANG |
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Method and apparatus for laser texturing a component |
Chih-Yang Chang, Shannon WANG, Jianqi Wang |
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Sealing member with lip seal |
Chih-Yang Chang, Sam Kim |
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High power tungsten halogen lamp lifetime improvement through J-hook design |
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| D1027120 |
Seal for an assembly in a vapor deposition chamber |
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2024-05-14 |
| 11881392 |
High power tungsten halogen lamp lifetime improvement through J-hook design |
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| 11856706 |
Method and system for improving the operation of semiconductor processing |
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2023-12-26 |
| 11532466 |
Part-life estimation utilizing feature metrology |
Chien-Min Liao, Tom K. Cho, Siamak Salimian, Hsiu Yang, Chun-Chung Chen |
2022-12-20 |
| 11359722 |
Multinode multi-use O-ring and method for forming a seal |
Shagun P. Maheshwari, King F. Lee, Andrew Yu, Aniruddha Pal, Tom K. Cho +1 more |
2022-06-14 |
| 11090893 |
Method of reclaiming a seal |
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| 11074426 |
Methods and systems for multi-part authentication and tracking |
Chien-Min Liao, Hsiu Yang, Jeevan Shanbhag, Chun-Chung Chen, Tom K. Cho |
2021-07-27 |
| 9089007 |
Method and apparatus for substrate support with multi-zone heating |
Jeonghoon Oh, Frank Hooshdaran, Tom K. Cho, Tao Hou |
2015-07-21 |
| 8911151 |
Substrate support bushing |
Tao Hou, Jeonghoon Oh, Tom K. Cho, Andrzej Matlosz, Frank Hooshdaran |
2014-12-16 |
| 8338809 |
Ultraviolet reflector with coolant gas holes and method |
Tuan Nguyen, Sanjeev Baluja, Andrzej Kaszuba, Juan Carlos Rocha, Thomas Nowak +1 more |
2012-12-25 |
| 8309421 |
Dual-bulb lamphead control methodology |
Abhijit A. Kangude, Sanjeev Baluja, Michael A. Martinelli, Liliya Krivulina, Thomas Nowak +2 more |
2012-11-13 |
| 7964858 |
Ultraviolet reflector with coolant gas holes and method |
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2011-06-21 |
