Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341048 | Porous plug for electrostatic chuck gas delivery | Alexander SULYMAN, Anwar Husain, Timothy Joseph Franklin, Joseph F. Sommers | 2025-06-24 |
| D1066275 | Baffle for anti-rotation process kit for substrate processing chamber | Rohan Rane, Timothy Joseph Franklin, Daniel Sang Byun | 2025-03-11 |
| 12211734 | Lift pin mechanism | Alexander SULYMAN, Carlaton WONG, Rajinder Dhindsa, Timothy Joseph Franklin, Steven E. Babayan +2 more | 2025-01-28 |
| 12198903 | Plasma resistant arc preventative coatings for manufacturing equipment components | Joseph F. Sommers, Joseph Behnke, Anwar Husain, Alexander SULYMAN, Timothy Joseph Franklin +1 more | 2025-01-14 |
| 12183605 | In-situ semiconductor processing chamber temperature apparatus | Andrew Nguyen, Yogananda SARODE, Kartik Ramaswamy | 2024-12-31 |
| D1049067 | Ring for an anti-rotation process kit for a substrate processing chamber | Rohan Rane, Timothy Joseph Franklin, Daniel Sang Byun | 2024-10-29 |
| 12100576 | Metal oxide preclean chamber with improved selectivity and flow conductance | Andrew Nguyen, Yu Lei, Xianmin Tang, John C. Forster, Yogananda Sarode Vishwanath +2 more | 2024-09-24 |
| 12020977 | Lift pin assembly | Alexander SULYMAN, Anwar Husain, Timothy Joseph Franklin, Carlaton WONG | 2024-06-25 |
| 11835146 | Symmetric flow valve for flow conductance control | Andrew Nguyen, Yogananda Sarode Vishwanath, Anilkumar Rayaroth, Chetan Naik, Balachandra Jatak Narayan | 2023-12-05 |
| 11551965 | Apparatus to reduce polymers deposition | Andrew Nguyen, Shahid Rauf, Jason A. Kenney | 2023-01-10 |
| 11211282 | Apparatus to reduce contamination in a plasma etching chamber | Andrew Nguyen | 2021-12-28 |
| 11199267 | Symmetric flow valve for higher flow conductance | Andrew Nguyen, Yogananda Sarode Vishwanath, Anilkumar Rayaroth, Chetan Naik, Balachandra Jatak Narayan | 2021-12-14 |
| 11069547 | In-situ temperature measurement for inside of process chamber | Andrew Nguyen | 2021-07-20 |
| 10847351 | Plasma chamber with tandem processing regions | Andrew Nguyen, Yogananda Sarode Vishwanath | 2020-11-24 |
| 10811233 | Process chamber having tunable showerhead and tunable liner | Andrew Nguyen, Haitao Wang, Kei-Yu Ko, Reza Sadjadi | 2020-10-20 |
| 10381200 | Plasma chamber with tandem processing regions | Andrew Nguyen, Yogananda Sarode Vishwanath | 2019-08-13 |