Issued Patents All Time
Showing 25 most recent of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10764986 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Hitoshi Nagano, Osamu Wakabayashi | 2020-09-01 |
| 10314152 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Hitoshi Nagano, Osamu Wakabayashi | 2019-06-04 |
| 10172225 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Osamu Wakabayashi, Tatsuya Yanagida | 2019-01-01 |
| 10126657 | Extreme ultraviolet light generating apparatus | Hirokazu HOSODA | 2018-11-13 |
| 10102938 | Extreme ultraviolet light generating apparatus | Takayuki Yabu, Kenichi Miyao, Tooru Abe | 2018-10-16 |
| 9986629 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Osamu Wakabayashi, Tatsuya Yanagida | 2018-05-29 |
| 9942973 | Extreme ultraviolet light generation apparatus | Yoshifumi Ueno, Hirokazu HOSODA, Takashi Saito | 2018-04-10 |
| 9872372 | Extreme ultraviolet light generation device | Atsushi Ueda, Shinji Nagai, Yoshifumi Ueno | 2018-01-16 |
| 9731848 | Bread conveying apparatus | Minoru Suzuki, Masami Umetsu, Takahiro Hasegawa, Shigehisa Sakamoto, Takeshi Nakamura +1 more | 2017-08-15 |
| 9578730 | Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system | Osamu Wakabayashi | 2017-02-21 |
| 9510433 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Hitoshi Nagano, Osamu Wakabayashi | 2016-11-29 |
| 9310686 | Target supply device and target supply method | Takayuki Yabu | 2016-04-12 |
| 8872142 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Hitoshi Nagano, Osamu Wakabayashi | 2014-10-28 |
| 8817838 | Laser device with optical element module on separate plate | Hideo Hoshino | 2014-08-26 |
| 8804902 | Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus | Hiroshi Someya, Takashi Suganuma, Hideo Hoshino, Akira Sumitani | 2014-08-12 |
| 8759804 | Chamber apparatus and extreme ultraviolet light generation system | Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi | 2014-06-24 |
| 8705035 | Target generation device | Takanobu Ishihara, Osamu Wakabayashi | 2014-04-22 |
| 8698116 | Extreme ultra violet light source apparatus | Masato Moriya, Osamu Wakabayashi, Takashi Suganuma, Akira Endo, Akira Sumitani | 2014-04-15 |
| 8698112 | Extreme ultraviolet light generation apparatus | Takayuki Yabu, Kouji Kakizaki, Takanobu Ishihara, Osamu Wakabayashi | 2014-04-15 |
| 8629417 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Takanobu Ishihara, Osamu Wakabayashi | 2014-01-14 |
| 8624208 | Extreme ultraviolet light generation system | Shinji Nagai, Hitoshi Nagano, Osamu Wakabayashi | 2014-01-07 |
| 8569723 | Extreme ultraviolet light source apparatus | Shinji Nagai, Takanobu Ishihara, Kouji Kakizaki | 2013-10-29 |
| 8558202 | Extreme ultraviolet light source apparatus | Tatsuya Yanagida, Akira Endo, Hiroshi Komori, Shinji Nagai, Kouji Kakizaki +1 more | 2013-10-15 |
| 8536551 | Extreme ultra violet light source apparatus | Masato Moriya, Osamu Wakabayashi, Takashi Suganuma, Akira Endo, Akira Sumitani | 2013-09-17 |
| 8536550 | Method and apparatus for cleaning collector mirror in EUV light generator | Takeshi Asayama, Hiroshi Someya, Masato Moriya, Hideo Hoshino | 2013-09-17 |