Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262833 | Temperature controlled ion source | Bon-Woong Koo, Brant S. Binns, Richard M. White, Kenneth L. Starks, Eric R. Cobb | 2019-04-16 |
| 9859098 | Temperature controlled ion source | Bon-Woong Koo, Brant S. Binns, Richard M. White, Kenneth L. Starks, Eric R. Cobb | 2018-01-02 |
| 9673076 | System and method for rotational transfer of articles between vacuum and non-vacuum environments | Sheri A. Roub, Stacia L. Theriault, Fletcher I. Potter, Daniel L. Goodwin, Omar S. Kiyani | 2017-06-06 |
| 9108322 | Force sensing system for substrate lifting apparatus | Richard V. Chisholm, Scott E. Peitzsch, Michael Esposito, Robert A. Poitras, Steven M. Anella +2 more | 2015-08-18 |
| 8149256 | Techniques for changing temperature of a platen | Roger B. Fish, Samuel M. Barsky, Arthur P. Riaf, Steven M. Anella | 2012-04-03 |
| 7993698 | Techniques for temperature controlled ion implantation | Julian G. Blake, Jonathan Gerald England, Steven R. Walther, Reuel B. Liebert, Richard S. Muka +4 more | 2011-08-09 |
| 7655933 | Techniques for temperature-controlled ion implantation | Jonathan Gerald England, Richard S. Muka | 2010-02-02 |
| 6046435 | Method of heating a substrate with multiple selectively deactuated heaters | Mehran Asdigha, Lawrence R. Moschini, Darius Dilmaghani, Mario Valenza | 2000-04-04 |
| 5911896 | Substrate heating apparatus with glass-ceramic panels and thin film ribbon heater element | Mehran Asdigha, Lawrence R. Moschini, Darius Dilmaghani, Mario Valenza | 1999-06-15 |
| 5436790 | Wafer sensing and clamping monitor | Julian G. Blake, Weilin Tu, Dale K. Stone | 1995-07-25 |
| 4542298 | Methods and apparatus for gas-assisted thermal transfer with a semiconductor wafer | — | 1985-09-17 |
| 4537244 | Method for optimum conductive heat transfer with a thin flexible workpiece | — | 1985-08-27 |
| 4535835 | Optimum surface contour for conductive heat transfer with a thin flexible workpiece | — | 1985-08-20 |
| 4508161 | Method for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer | — | 1985-04-02 |
| 4504194 | Air lock vacuum pumping methods and apparatus | — | 1985-03-12 |
| 4475045 | Rapid pumpdown for high vacuum processing | Norman L. Turner | 1984-10-02 |
| 4458746 | Optimum surface contour for conductive heat transfer with a thin flexible workpiece | Peter R. Hanley | 1984-07-10 |
| 4457359 | Apparatus for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer | — | 1984-07-03 |