Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11956883 | Methods and apparatus for controlling RF parameters at multiple frequencies | Zheng John Ye, Daemian Raj Benjamin Raj, Shailendra Srivastava, Nikhil Sudhindrarao Jorapur, Dmitry A. Dzilno +1 more | 2024-04-09 |
| 11570879 | Methods and apparatus for controlling RF parameters at multiple frequencies | Zheng John Ye, Daemian Raj Benjamin Raj, Shailendra Srivastava, Nikhil Sudhindrarao Jorapur, Dmitry A. Dzilno +1 more | 2023-01-31 |
| 10276353 | Dual-channel showerhead for formation of film stacks | Kaushik Alayavalli, Xinhai Han, Praket P. Jha, Masaki Ogata, Zhijun Jiang +6 more | 2019-04-30 |
| 10100408 | Edge hump reduction faceplate by plasma modulation | Sungwon Ha, Kwangduk Douglas Lee, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Martin Jay Seamons +5 more | 2018-10-16 |
| 7589336 | Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors | Andrzei Kaszuba, Juan Carlos Rocha-Alvarez, Thomas Nowak, Sanjeev Baluja | 2009-09-15 |
| 7554103 | Increased tool utilization/reduction in MWBC for UV curing chamber | Juan Carlos Rocha-Alvarez, Thomas Nowak, Sanjeev Baluja, Andrzej Kaszuba | 2009-06-30 |
| 7074298 | High density plasma CVD chamber | Sudhir Gondhalekar, Tom K. Cho, Rolf Guenther, Shigeru Takehiro, Masayoshi Nohira +1 more | 2006-07-11 |