Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300491 | Deposition of semiconductor integration films | Mark Saly, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan, Regina Freed +3 more | 2025-05-13 |
| 12281382 | Methods for depositing blocking layers on conductive surfaces | Bhaskar Jyoti Bhuyan, Aaron Dangerfield, Feng Q. Liu, Mark Saly, Michael Haverty +1 more | 2025-04-22 |
| 12282256 | Photoresist deposition using independent multichannel showerhead | Farzad Houshmand, Wayne French, Anantha K. Subramani, Kelvin Chan, Mark Saly | 2025-04-22 |
| 12261049 | Selective etch of a substrate | David Thompson, Bhaskar Jyoti Bhuyan, Mark Saly, Lisa J. Enman, Aaron Dangerfield +2 more | 2025-03-25 |
| 12131900 | Methods for depositing blocking layers on metal surfaces | Bhaskar Jyoti Bhuyan, Mark Saly, Thomas Knisley | 2024-10-29 |
| 12084764 | Vapor phase photoresists deposition | Aaron Dangerfield, Mark Saly, David Thompson, Susmit Singha Roy, Regina Freed | 2024-09-10 |
| 12068170 | Vapor phase thermal etch solutions for metal oxo photoresists | Mark Saly, Bhaskar Jyoti Bhuyan, Madhur Sachan, Regina Freed | 2024-08-20 |
| 12033866 | Vapor phase thermal etch solutions for metal oxo photoresists | Mark Saly, Bhaskar Jyoti Bhuyan, Madhur Sachan, Regina Freed | 2024-07-09 |
| 12031209 | Reducing agents for atomic layer deposition | Bhaskar Jyoti Bhuyan, Mark Saly, Thomas Knisley | 2024-07-09 |
| 12018363 | Gap-fill with aluminum-containing films | Mark Saly, Jeffrey W. Anthis, Tatsuya Sato | 2024-06-25 |
| 11942330 | Methods for selective dry etching gallium oxide | Feng Q. Liu, Lisa J. Enman, Mark Saly | 2024-03-26 |
| 11886120 | Deposition of semiconductor integration films | Mark Saly, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan, Regina Freed +3 more | 2024-01-30 |
| 11702733 | Methods for depositing blocking layers on conductive surfaces | Bhaskar Jyoti Bhuyan, Aaron Dangerfield, Feng Q. Liu, Mark Saly, Michael Haverty +1 more | 2023-07-18 |
| 11621172 | Vapor phase thermal etch solutions for metal oxo photoresists | Mark Saly, Bhaskar Jyoti Bhuyan, Madhur Sachan, Regina Freed | 2023-04-04 |
| 11562904 | Deposition of semiconductor integration films | Mark Saly, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan, Regina Freed +3 more | 2023-01-24 |
| 11515149 | Deposition of flowable silicon-containing films | Mark Saly, David Thompson, Abhijit Basu Mallick, Tejasvi Ashok, Pramit Manna | 2022-11-29 |
| 11417515 | Methods for depositing blocking layers on metal surfaces | Bhaskar Jyoti Bhuyan, Mark Saly, Thomas Knisley | 2022-08-16 |
| 11398388 | Methods for selective dry etching gallium oxide | Feng Q. Liu, Lisa J. Enman, Mark Saly | 2022-07-26 |
| 11393678 | Low-k dielectric films | William J. Durand, Mark Saly, Kang Sub Yim, Shaunak Mukherjee | 2022-07-19 |
| 11371136 | Methods for selective deposition of dielectric on silicon oxide | Bhaskar Jyoti Bhuyan, Mark Saly, David Thompson, Rana Howlader | 2022-06-28 |
| 11289328 | Deposition and etch processes of chromium-containing thin films for semiconductor manufacturing | Thomas Knisley, Mark Saly, David Thompson | 2022-03-29 |
| 11217443 | Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates | Vinayak Veer Vats, Hang Yu, Philip Allan Kraus, Sanjay Kamath, William J. Durand +6 more | 2022-01-04 |
| 11107674 | Methods for depositing silicon nitride | Mark Saly, Praket P. Jha, Jingmei Liang | 2021-08-31 |
| 10985009 | Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources | Mark Saly, David Thompson, William J. Durand, Kelvin Chan, Hanhong Chen +1 more | 2021-04-20 |
| 10760159 | Methods and apparatus for depositing yttrium-containing films | Mark Saly, Thomas Knisley, Benjamin Schmiege, David Thompson | 2020-09-01 |