Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334385 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2025-06-17 |
| 12243756 | Temperature controlled substrate support assembly | Vijay D. Parkhe, Masanori Ono, Zhiqiang Guo | 2025-03-04 |
| 12009244 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2024-06-11 |
| 11158526 | Temperature controlled substrate support assembly | Vijay D. Parkhe, Masanori Ono, Zhiqiang Guo | 2021-10-26 |
| 11088005 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Jason C. Della Rosa, Hamid Noobakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2021-08-10 |
| 10622229 | Electrostatic chuck with independent zone cooling and reduced crosstalk | Vijay D. Parkhe | 2020-04-14 |
| 10535544 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2020-01-14 |
| 10460916 | Real time monitoring with closed loop chucking force control | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Masanori Ono, Senh Thach | 2019-10-29 |
| 10403534 | Pixilated cooling, temperature controlled substrate support assembly | Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Matthew J. Busche, Masanori Ono, Senh Thach | 2019-09-03 |
| 10304715 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Jason Della Rosa, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2019-05-28 |
| 10121688 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Masanori Ono | 2018-11-06 |
| 10079165 | Electrostatic chuck with independent zone cooling and reduced crosstalk | Vijay D. Parkhe | 2018-09-18 |
| 10026636 | Electrostatic chuck having reduced power loss | Jennifer Y. Sun | 2018-07-17 |
| 9991148 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Jason C. Della Rosa, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2018-06-05 |
| 9948214 | High temperature electrostatic chuck with real-time heat zone regulating capability | Dmitry Lubomirsky, Jennifer Y. Sun, Sehn Thach, Xing Lin, Michael D. Willwerth | 2018-04-17 |
| 9875923 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Masanori Ono, Senh Thach | 2018-01-23 |
| 9666466 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Jason C. Della Rosa, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2017-05-30 |
| 9622375 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Masanori Ono | 2017-04-11 |
| 9558981 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Masanori Ono, Senh Thach | 2017-01-31 |
| 9520315 | Electrostatic chuck with internal flow adjustments for improved temperature distribution | Vijay D. Parkhe, Matthew J. Busche, Wendell Glenn Boyd, Jr., Senh Thach, Masanori Ono | 2016-12-13 |
| 9472435 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2016-10-18 |
| 9299539 | Method and apparatus for measuring wafer bias potential | John C. Valcore, Jr. | 2016-03-29 |
| 9281226 | Electrostatic chuck having reduced power loss | Jennifer Y. Sun | 2016-03-08 |
| 8941969 | Single-body electrostatic chuck | Senh Thach, Dmitry Lubomirsky, Jennifer Y. Sun | 2015-01-27 |
| 8937800 | Electrostatic chuck with advanced RF and temperature uniformity | Dmitry Lubomirsky, Jennifer Y. Sun, Mark Markovsky, Douglas A. Buchberger, Jr., Samer Banna | 2015-01-20 |