Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371796 | Substrate processing apparatus, substrate processing method, and chemical liquid | Tetsuya Sakazaki | 2025-07-29 |
| 12002687 | System and methods for wafer drying | Trace Hurd, Antonio Luis Pacheco Rotondaro, Derek Bassett | 2024-06-04 |
| 11545367 | Substrate processing apparatus, substrate processing method, and chemical liquid | Tetsuya Sakazaki | 2023-01-03 |
| 11515178 | System and methods for wafer drying | Trace Hurd, Antonio Luis Pacheco Rotondaro, Derek Bassett | 2022-11-29 |
| 11309194 | Substrate liquid treatment apparatus | Koji Tanaka, Toshiyuki Shiokawa, Koji Yamashita, Hiroyuki Masutomi, Takao Inada +2 more | 2022-04-19 |
| 11217451 | Substrate processing method and substrate processing apparatus | Shota Umezaki, Kouzou Tachibana, Ryo Yamamoto | 2022-01-04 |
| 8889337 | Film forming method, film forming apparatus and pattern forming method | Taro Yamamoto, Yoshiaki Yamada, Yasuhito Saiga | 2014-11-18 |
| 8420303 | Substrate processing method, computer-readable storage medium and substrate processing system | Yoshiaki Yamada, Keiichi Tanaka | 2013-04-16 |
| 8376637 | Photoresist coating and developing apparatus, substrate transfer method and interface apparatus | Yoshiaki Yamada, Yuichi Yamamoto, Seiji Fujimoto | 2013-02-19 |
| 8133663 | Pattern forming method and apparatus | Taro Yamamoto, Yoshiaki Yamada, Yasuhito Saiga | 2012-03-13 |
| 7924396 | Coating/developing apparatus and pattern forming method | Hisashi Kawano, Junichi Kitano, Koichi Hontake, Masashi Enomoto | 2011-04-12 |
| 7826032 | Circulation system for high refractive index liquid in pattern forming apparatus | Taro Yamamoto, Yoshiaki Yamada, Yasuhito Saiga | 2010-11-02 |
| 7733472 | Method and system for determining condition of process performed for coating film before immersion light exposure | Taro Yamamoto | 2010-06-08 |
| 7651285 | Edge exposure apparatus, coating and developing apparatus, edge exposure method and coating and developing method, and storage medium | Taro Yamamoto, Yoshiaki Yamada, Yasuhito Saiga | 2010-01-26 |
| 7431040 | Method and apparatus for dispensing a rinse solution on a substrate | — | 2008-10-07 |
| 6780940 | Adhesive resin composition and method for separating adherends bonded together by the composition | Nori Yoshihara, Kenji Ohama, Satoshi Sakai, Koji Nakanishi | 2004-08-24 |
| 6496245 | Developing method and developing apparatus | Hideharu Kyouda | 2002-12-17 |
| 6267516 | Developing apparatus and developing nozzle | Shuichi Nagamine, Masami Akimoto, Akira Nishiya | 2001-07-31 |