Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9726617 | Apparatus and methods for finding a best aperture and mode to enhance defect detection | Pavel Kolchin, Richard Wallingford, Lisheng Gao, Markus Huber, Robert M. Danen | 2017-08-08 |
| 9709510 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Pavel Kolchin, Mikhail Haurylau, Junwei Wei, Dan Kapp, Robert M. Danen | 2017-07-18 |
| 9703207 | System and method for reducing dynamic range in images of patterned regions of semiconductor wafers | Daniel L. Cavan | 2017-07-11 |
| 9645093 | System and method for apodization in a semiconductor device inspection system | Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk +8 more | 2017-05-09 |
| 9552636 | Detecting defects on a wafer using defect-specific and multi-channel information | Kenong Wu, Lisheng Gao, David W. Shortt | 2017-01-24 |
| 9523646 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Rudolf Brunner, Lisheng Gao, Robert M. Danen, Lu Chen | 2016-12-20 |
| 9442077 | Scratch filter for wafer inspection | Junqing Huang, Huan Jin, Lisheng Gao | 2016-09-13 |
| 9422517 | Microscale and nanoscale structures for manipulating particles | Fabio Fachin, Mehmet Toner, Brian L. Wardle | 2016-08-23 |
| 9389166 | Enhanced high-speed logarithmic photo-detector for spot scanning system | Ralph C. Wolf, Kai Cao, Jamie M. Sullivan, Paul Donders, Derek Mackay | 2016-07-12 |
| 9347891 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Rudolf Brunner, Lisheng Gao, Robert M. Danen, Lu Chen | 2016-05-24 |
| 9239295 | Variable polarization wafer inspection | Xianzhao Peng, Mark Wang | 2016-01-19 |
| 9176069 | System and method for apodization in a semiconductor device inspection system | Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk +8 more | 2015-11-03 |
| 9128064 | Super resolution inspection system | Daniel L. Cavan, Qibiao Chen | 2015-09-08 |
| 9092846 | Detecting defects on a wafer using defect-specific and multi-channel information | Kenong Wu, Lisheng Gao, David W. Shortt | 2015-07-28 |
| 8989479 | Region based virtual fourier filter | Lisheng Gao, Kenong Wu, Allen Park, Ellis Chang, Khurram Zafar +5 more | 2015-03-24 |
| 7535563 | Systems configured to inspect a specimen | Tao-Yi Fu, Jamie M. Sullivan, Shing Lee, Greg Kirk | 2009-05-19 |
| 7505619 | System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface | Evan R. Mapoles, Christopher F. Bevis, David W. Shortt | 2009-03-17 |
| 7436503 | Dark field inspection apparatus and methods | Tao-Yi Fu, Evan R. Mapoles | 2008-10-14 |
| 7317527 | Spatial light modulator fourier transform | Dragos Maciuca, Tao-Yi Fu | 2008-01-08 |
| 7106432 | Surface inspection system and method for using photo detector array to detect defects in inspection surface | Evan R. Mapoles, Christopher F. Bevis, David W. Shortt | 2006-09-12 |