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Lithographic apparatus and a method of operating the apparatus |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma +6 more |
2019-10-01 |
| 10151984 |
Lithographic apparatus and a method of operating the apparatus |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma +6 more |
2018-12-11 |
| 9785061 |
Lithographic apparatus and in-line cleaning apparatus |
Roelof Frederik De Graaf, Hans Jansen, Hubertus Leonardus Franciscus Heusschen |
2017-10-10 |
| 9405205 |
Lithographic apparatus and in-line cleaning apparatus |
Roelof Frederik De Graaf, Hans Jansen, Hubertus Leonardus Franciscus Heusschen |
2016-08-02 |
| 9176371 |
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma +6 more |
2015-11-03 |
| 9036128 |
Lithographic apparatus and in-line cleaning apparatus |
Roelof Frederik De Graaf, Hans Jansen, Hubertus Leonardus Franciscus Heusschen |
2015-05-19 |
| 9013672 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2015-04-21 |
| 8947629 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2015-02-03 |
| 8730447 |
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Arnout Johannes Meester +3 more |
2014-05-20 |
| 8564757 |
Lithographic apparatus and a method of operating the apparatus |
Richard Joseph Bruls, Hans Jansen, Antonius Johannus Van Der Net, Pieter Jacob Kramer, Anthonie Kuijper +2 more |
2013-10-22 |
| 8243255 |
Lithographic apparatus and in-line cleaning apparatus |
Roelof Frederik De Graaf, Hans Jansen, Hubertus Leonardus Franciscus Heusschen |
2012-08-14 |
| 8094287 |
Lithographic appararus and method |
Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra, Antonius Johannes Van Der Net, Yuri Johannes Gabriël Van De Vijver, Bernhard Gellrich +1 more |
2012-01-10 |
| 8011377 |
Cleaning device and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-09-06 |
| 7900641 |
Cleaning device and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-03-08 |
| 7866330 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Raymond Gerardus Marius Beeren, Anthonius Martinus Cornelis Petrus De Jong, Kornelis Tijmen Hoekerd |
2011-01-11 |
| 7841352 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Raymond Gerardus Marius Beeren, Anthonius Martinus Cornelis Petrus De Jong, Kornelis Tijmen Hoekerd |
2010-11-30 |
| 7649702 |
Immersion lithography objective |
Bernhard Gellrich, Paul Graeupner, Juergen Fischer, Andreas Wurmbrand, Bob Streefkerk +2 more |
2010-01-19 |
| 7446849 |
Lithographic apparatus and device manufacturing method |
Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra, Antonius Johannes Van Der Net, Yuri Johannes Gabriël Van De Vijver, Bernard Gellrich +1 more |
2008-11-04 |