Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948815 | High density pick and sequential place transfer process and tool | Dariusz Golda, Hyeun-Su Kim | 2024-04-02 |
| 11820651 | Mass transfer tool with high productivity | — | 2023-11-21 |
| 11009801 | Dynamic cooling control for thermal stabilization for lithography system | Benjamin M. Johnston, David Michael CORRIVEAU, Cheuk Ming LEE, Jae Myung YOO, WeiMin Tao | 2021-05-18 |
| 10788762 | Dynamic cooling control for thermal stabilization for lithography system | Benjamin M. Johnston, David Michael CORRIVEAU, Cheuk Ming LEE, Jae Myung YOO, WeiMin Tao | 2020-09-29 |
| 10451564 | Empirical detection of lens aberration for diffraction-limited optical system | Qin Zhong, Hwan J. Jeong | 2019-10-22 |
| 8142260 | Methods and apparatus for removal of films and flakes from the edge of both sides of a substrate using backing pads | Eashwer Chandra Vidhya Sagar Kollata, Shou-Sung Chang, Zhenhua Zhang, Paul D. Butterfield, Sen-Hou Ko +2 more | 2012-03-27 |
| 8129658 | Systems for thin film laser scribing devices | Wei-Sheng Lei | 2012-03-06 |
| 8066552 | Multi-layer polishing pad for low-pressure polishing | Alain Duboust, Shou-Sung Chang, Wei Lu, Siew Neo, Yan Wang +1 more | 2011-11-29 |
| 8043870 | CMP pad thickness and profile monitoring system | Wei-Yung Hsu, Hichem M'Saad | 2011-10-25 |
| 7790015 | Endpoint for electroprocessing | Yan Wang, Siew Neo, Alain Duboust, Liang-Yuh Chen | 2010-09-07 |
| 7709382 | Electroprocessing profile control | Vladimir Galburt, Yan Wang, Alain Duboust, Donald Olgado, Liang-Yuh Chen | 2010-05-04 |
| 7678245 | Method and apparatus for electrochemical mechanical processing | Yan Wang, Siew Neo, Feng Q. Liu, Stan Tsai, Yongqi Hu +9 more | 2010-03-16 |
| 7655565 | Electroprocessing profile control | Vladimir Galburt, Yan Wang, Alain Duboust, Donald Olgado, Liang-Yuh Chen | 2010-02-02 |
| 7628905 | Algorithm for real-time process control of electro-polishing | Alain Duboust, Siew Neo, Liang-Yuh Chen | 2009-12-08 |
| 7608173 | Biased retaining ring | Feng Q. Liu, Paul D. Butterfield, Alain Duboust, Rashid Mavliev | 2009-10-27 |
| 7569134 | Contacts for electrochemical processing | Paul D. Butterfield, Liang-Yuh Chen, Yongqi Hu, Rashid Mavliev, Stan Tsai | 2009-08-04 |
| 7520795 | Grooved retaining ring | Shi-Ping Wang, Alain Duboust, Wei-Yung Hsu, Jose Salas-Vernis, Zhihong Wang | 2009-04-21 |
| 7422516 | Conductive polishing article for electrochemical mechanical polishing | Paul D. Butterfield, Liang-Yuh Chen, Yonqi Hu, Rashid Mavliev, Stan Tsai +5 more | 2008-09-09 |
| 7374644 | Conductive polishing article for electrochemical mechanical polishing | Paul D. Butterfield, Liang-Yuh Chen, Yongqi Hu, Rashid Mavliev, Stan Tsai +2 more | 2008-05-20 |
| 7303462 | Edge bead removal by an electro polishing process | Alain Duboust, Liang-Yuh Chen | 2007-12-04 |
| 7303662 | Contacts for electrochemical processing | Rashid Mavliev, Stan Tsai, Yongqi Hu, Paul D. Butterfield, Liang-Yuh Chen | 2007-12-04 |
| 7294038 | Process control in electrochemically assisted planarization | Liang-Yuh Chen | 2007-11-13 |
| 7278911 | Conductive polishing article for electrochemical mechanical polishing | Paul D. Butterfield, Liang-Yuh Chen, Yonqi Hu, Rashid Mavliev, Stan Tsai +5 more | 2007-10-09 |
| 7276743 | Retaining ring with conductive portion | Suresh Shrauti, Alain Duboust, Yan Wang, Liang-Yuh Chen | 2007-10-02 |
| 7207878 | Conductive polishing article for electrochemical mechanical polishing | Yongqi Hu, Yan Wang, Alain Duboust, Feng Q. Liu, Siew Neo +5 more | 2007-04-24 |