Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379671 | Model based dynamic positional correction for digital lithography tools | Tamer Coskun, Muhammet Poyraz, Pacha Mongkolwongrojn | 2025-08-05 |
| 12099308 | Methods and apparatus for correcting lithography systems | Hwan J. Jeong | 2024-09-24 |
| 10996572 | Model based dynamic positional correction for digital lithography tools | Tamer Coskun, Muhammet Poyraz, Pacha Mongkolwongrojn | 2021-05-04 |
| 10585360 | Exposure system alignment and calibration method | Tamer Coskun | 2020-03-10 |
| 10451564 | Empirical detection of lens aberration for diffraction-limited optical system | Antoine P. Manens, Hwan J. Jeong | 2019-10-22 |
| 9614886 | Method for processing information and server | Zhiqiang Zhao, Xiaobo Jia | 2017-04-04 |