Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322573 | Pulsing plasma treatment for film densification | Rui Li, Xiangjin Xie, Xianmin Tang | 2025-06-03 |
| 12136544 | Etch uniformity improvement for single turn internal coil PVD chamber | Adolph Miller Allen, Mehul Chauhan, Goichi Yoshidome | 2024-11-05 |
| 12112890 | Top magnets for decreased non-uniformity in PVD | Borui Xia, Shiyu YUE, Wei-Sheng Lei, Aravind Kamath, Mukund Sundararajan +2 more | 2024-10-08 |
| 11846013 | Methods and apparatus for extended chamber for through silicon via deposition | David Gunther, Jiao Song, Kirankumar Neelasandra SAVANDAIAH, Irena H. Wysok | 2023-12-19 |
| 11581166 | Low profile deposition ring for enhanced life | Kirankumar Neelasandra SAVANDAIAH, Jiao Song, David Gunther, Irena H. Wysok | 2023-02-14 |
| 11295938 | Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereof | Jiao Song, David Gunther, Kirankumar Neelasandra SAVANDAIAH, Irena H. Wysok | 2022-04-05 |
| D933726 | Deposition ring for a semiconductor processing chamber | Kirankumar Neelasandra SAVANDAIAH, Jiao Song, David Gunther, Irena H. Wysok | 2021-10-19 |
| D894137 | Target profile for a physical vapor deposition chamber target | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Siew Kit Hoi, Prashant Prabhakar Prabhu | 2020-08-25 |
| D851613 | Target profile for a physical vapor deposition chamber target | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Siew Kit Hoi, Prashant Prabhakar Prabhu | 2019-06-18 |
| 7767572 | Methods of forming a barrier layer in an interconnect structure | Chong Jiang | 2010-08-03 |
| 6469283 | Method and apparatus for reducing thermal gradients within a substrate support | Vincent E. Burkhart, Steven V. Sansoni, Michael Sugarman | 2002-10-22 |