Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287584 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more | 2025-04-29 |
| 12254392 | Apparatus and method for property joint interpolation and prediction | Faegheh Hasibi, Leon Paul VAN DIJK, Maialen LARRANAGA, Richard Johannes Franciscus Van Haren | 2025-03-18 |
| 12204298 | Methods of modelling systems for performing predictive maintenance of systems, such as lithographic systems | Carlo LANCIA, Anjan Prasad Gantapara, Dirk-Jan Kernkamp, Seyed Iman Mossavat | 2025-01-21 |
| 12044981 | Method and apparatus for optimization of lithographic process | Marc Hauptmann, Everhardus Cornelis Mos, Weitian Kou, Michiel Kupers, Hyunwoo Yu +1 more | 2024-07-23 |
| 12045555 | Method to label substrates based on process parameters | Vahid BASTANI, Dag Sonntag, Everhardus Cornelis Mos, Hakki Ergün Cekli, Chenxi Lin | 2024-07-23 |
| 11940740 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more | 2024-03-26 |
| 11782349 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more | 2023-10-10 |
| 11740560 | Method for determining an inspection strategy for a group of substrates in a semiconductor manufacturing process | Eleftherios KOULIERAKIS, Carlo LANCIA, Juan Manuel Gonzalez Huesca, Dimitra GKOROU, Reza SAHRAEIAN | 2023-08-29 |
| 11714357 | Method to predict yield of a device manufacturing process | Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag, Hakki Ergün Cekli +9 more | 2023-08-01 |
| 11592753 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more | 2023-02-28 |
| 11579534 | Extracting a feature from a data set | Maialen LARRANAGA, Dimitra GKOROU, Faegheh Hasibi | 2023-02-14 |
| 11520238 | Optimizing an apparatus for multi-stage processing of product units | Jelle Nije, Dimitra GKOROU, Georgios TSIROGIANNIS, Robert Jan Van Wijk, Tzu-Chao CHEN +3 more | 2022-12-06 |
| 11385550 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more | 2022-07-12 |
| 11327407 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more | 2022-05-10 |
| 11320743 | Method to label substrates based on process parameters | Vahid BASTANI | 2022-05-03 |
| 11150562 | Optimizing an apparatus for multi-stage processing of product units | Jelle Nije, Dimitra GKOROU, Georgios TSIROGIANNIS, Robert Jan Van Wijk, Tzu-Chao CHEN +3 more | 2021-10-19 |
| 11099485 | Maintaining a set of process fingerprints | Vahid BASTANI, Dag Sonntag, Jelle Nije, Hakki Ergün Cekli, Georgios TSIROGIANNIS +1 more | 2021-08-24 |
| 11099487 | Method and apparatus for optimization of lithographic process | Marc Hauptmann, Everhardus Cornelis Mos, Weitian Kou, Michiel Kupers, Hyunwoo Yu +1 more | 2021-08-24 |
| 11099486 | Generating predicted data for control or monitoring of a production process | Dimitra GKOROU, Georgios TSIROGIANNIS, Thomas Leo Maria Hoogenboom, Richard Johannes Franciscus Van Haren | 2021-08-24 |
| 11086229 | Method to predict yield of a device manufacturing process | Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag, Hakki Ergün Cekli +9 more | 2021-08-10 |
| 11054813 | Method and apparatus for controlling an industrial process using product grouping | David Deckers, Franciscus Godefridus Casper Bijnen, Richard Johannes Franciscus Van Haren, Weitian Kou | 2021-07-06 |
| 10877381 | Methods of determining corrections for a patterning process | Weitian Kou, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more | 2020-12-29 |
| 10642162 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more | 2020-05-05 |
| 10539882 | Methods and apparatus for obtaining diagnostic information, methods and apparatus for controlling an industrial process | Adrianus Cornelis Matheus Koopman, Scott Anderson Middlebrooks | 2020-01-21 |
| 10474045 | Lithographic apparatus and device manufacturing method | Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Patricius Aloysius Jacobus Tinnemans, Irina Lyulina +6 more | 2019-11-12 |