Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322568 | Auto-focus sensor implementation for multi-column microscopes | Nicholas Petrone, Lawrence P. Muray | 2025-06-03 |
| 12264554 | Valve arrangement | Rylan Paul D'Souza | 2025-04-01 |
| 11699607 | Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electrons | John Gerling, Lawrence P. Muray, James Spallas, Marcel Trimpl | 2023-07-11 |
| 11495428 | Plasmonic photocathode emitters at ultraviolet and visible wavelengths | Katerina Ioakeimidi, Gildardo Delgado, Frances Hill, Gary V. Lopez Lopez, Miguel A. Gonzalez | 2022-11-08 |
| 11410830 | Defect inspection and review using transmissive current image of charged particle beam system | Hong Xiao, Lawrence P. Muray, Nick Petrone, John Gerling, Abdurrahman Sezginer +3 more | 2022-08-09 |
| 11373838 | Multi-beam electron characterization tool with telecentric illumination | — | 2022-06-28 |
| 11302511 | Field curvature correction for multi-beam inspection systems | Rainer Knippelmeyer, Christopher Sears, John Rouse, Grace Hsiu-Ling Chen | 2022-04-12 |
| 11239048 | Arrayed column detector | Lawrence P. Muray, John Fielden | 2022-02-01 |
| 10497536 | Apparatus and method for correcting arrayed astigmatism in a multi-column scanning electron microscopy system | — | 2019-12-03 |
| 10338013 | Position feedback for multi-beam particle detector | Christopher Sears | 2019-07-02 |
| 10242839 | Reduced Coulomb interactions in a multi-beam column | — | 2019-03-26 |
| 10072334 | Digital pattern generator having charge drain coating | William M. Tong, Jeffrey W. Elam, Anil U. Mane | 2018-09-11 |
| 9874597 | Light-emitting device test systems | Mark A. McCord, James George, Yu Guan, Ralph Nyffenegger | 2018-01-23 |
| 9824851 | Charge drain coating for electron-optical MEMS | William M. Tong, Jeffrey W. Elam, Anil U. Mane | 2017-11-21 |
| 9715995 | Apparatus and methods for electron beam lithography using array cathode | Keith Standiford, Paul F. Petric | 2017-07-25 |
| 9214344 | Pillar-supported array of micro electron lenses | Yehiel Gotkis, Allen M. Carroll, Leonid Baranov | 2015-12-15 |
| 9040942 | Electron beam lithography with linear column array and rotary stage | Keith Standiford | 2015-05-26 |
| 8957394 | Compact high-voltage electron gun | Joseph Maurino, Mark A. McCord, Paul F. Petric | 2015-02-17 |
| 8642981 | Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool | Paul F. Petric, Mark A. McCord, Michael D. Madsen | 2014-02-04 |
| 8253119 | Well-based dynamic pattern generator | Paul F. Petric, Mark A. McCord | 2012-08-28 |
| 8063365 | Non-shot-noise-limited source for electron beam lithography or inspection | Keith Standiford | 2011-11-22 |
| 7855362 | Contamination pinning for auger analysis | Mehran Nasser-Ghodsi | 2010-12-21 |
| 7828622 | Sharpening metal carbide emitters | Mehran Nasser-Ghodsi, Ming Lun Yu | 2010-11-09 |
| 7615747 | Sampling feedback system | — | 2009-11-10 |
| 7405402 | Method and apparatus for aberration-insensitive electron beam imaging | Srinivas Vedula, Amir Azordegan, Laurence S. Hordon, Gian Francesco Lorusso, Takuji Tada | 2008-07-29 |