Issued Patents All Time
Showing 76–97 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7658790 | Concentrated electroless solution for selective deposition of cobalt-based capping/barrier layers | Alexander Gorer, Tony P. Chiang | 2010-02-09 |
| 7629198 | Methods for forming nonvolatile memory elements with resistive-switching metal oxides | Nitin Kumar, Jinhong Tong, Tony P. Chiang, Prashant B. Phatak | 2009-12-08 |
| 7582555 | CVD flowable gap fill | Judy H. Huang, Michael Barnes, Sunil Shanker | 2009-09-01 |
| 7524735 | Flowable film dielectric gap fill process | Vishal Gauri, Raashina Humayun, Judy H. Huang, Michael Barnes, Sunil Shanker | 2009-04-28 |
| 7514375 | Pulsed bias having high pulse frequency for filling gaps with dielectric material | Sunil Shanker | 2009-04-07 |
| 7482245 | Stress profile modulation in STI gap fill | Jengyi Yu, Judy H. Huang | 2009-01-27 |
| 7476621 | Halogen-free noble gas assisted H2 plasma etch process in deposition-etch-deposition gap fill | Minh Anh Nguyen, Wenxian Zhu, Judy H. Huang | 2009-01-13 |
| 7465659 | Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD) | Kang Sub Yim, Melissa M. Tam, Dian Sugiarto, Peter Wai-Man Lee, Li-Qun Xia | 2008-12-16 |
| 7435684 | Resolving of fluorine loading effect in the vacuum chamber | Ratsamee Limdulpaiboon, Kan Quan Vo | 2008-10-14 |
| 7381451 | Strain engineering—HDP thin film with tensile stress for FEOL and other applications | Ratsamee Limdulpaiboon, Cayetano Gonzalez | 2008-06-03 |
| 7344996 | Helium-based etch process in deposition-etch-deposition gap fill | Wenxian Zhu, Ratsamee Limdulpaiboon, Judy H. Huang | 2008-03-18 |
| 7211525 | Hydrogen treatment enhanced gap fill | Sunil Shanker, Sean Cox, Judy H. Huang, Minh Anh Nguyen, Ken Vo +1 more | 2007-05-01 |
| 7157384 | Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD) | Kang Sub Yim, Melissa M. Tam, Dian Sugiarto, Peter Wai-Man Lee, Li-Qun Xia | 2007-01-02 |
| 7153787 | CVD plasma assisted lower dielectric constant SICOH film | Seon-Mee Cho, Peter Wai-Man Lee, Dian Sugiarto, Chen-An Chen, Li-Qun Xia +2 more | 2006-12-26 |
| 6943127 | CVD plasma assisted lower dielectric constant SICOH film | Seon-Mee Cho, Peter Wai-Man Lee, Dian Sugiarto, Chen-An Chen, Li-Qun Xia +2 more | 2005-09-13 |
| 6849562 | Method of depositing a low k dielectric barrier film for copper damascene application | Li-Qun Xia, Ping Xu, Louis Yang | 2005-02-01 |
| 6838393 | Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide | Kang Sub Yim, Melissa M. Tam, Dian Sugiarto, Peter Wai-Man Lee, Li-Qun Xia | 2005-01-04 |
| 6709715 | Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds | Shin-Puu Jeng, Yeming Jim Ma, Fong Chang, Peter Wai-Man Lee, David Cheung | 2004-03-23 |
| 6486082 | CVD plasma assisted lower dielectric constant sicoh film | Seon-Mee Cho, Peter Wai-Man Lee, Dian Sugiarto, Chen-An Chen, Li-Qun Xia +2 more | 2002-11-26 |
| 6413583 | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound | Farhad Moghadam, David Cheung, Ellie Yieh, Li-Qun Xia, Wai-Fan Yau +4 more | 2002-07-02 |
| 6107184 | Nano-porous copolymer films having low dielectric constants | Robert P. Mandal, David Cheung, Peter Wai-Man Lee | 2000-08-22 |
| 6086952 | Chemical vapor deposition of a copolymer of p-xylylene and a multivinyl silicon/oxygen comonomer | Yeming Jim Ma, Fong Chang, Peter Wai-Man Lee, Shin-Puu Jeng, David Cheung | 2000-07-11 |