Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7411207 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2008-08-12 |
| 7369223 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Minori Noguchi, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2008-05-06 |
| 7332359 | Semiconductor device inspection method | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama | 2008-02-19 |
| 7315363 | Inspection method and inspection apparatus | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Takahiro Jingu, Sachio Uto | 2008-01-01 |
| 7262425 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2007-08-28 |
| 7248352 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Takahiro Jingu, Sachio Uto | 2007-07-24 |
| 7177020 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yukio Kembo, Hidetoshi Nishiyama, Kazuhiko Matsuoka +1 more | 2007-02-13 |
| 7098055 | Apparatus and method for testing defects | Minori Noguchi, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2006-08-29 |
| 7061602 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2006-06-13 |
| 7037735 | Apparatus and method for testing defects | Minori Noguchi, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2006-05-02 |
| 6936835 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2005-08-30 |
| 6894773 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yukio Kembo, Hidetoshi Nishiyama, Kazuhiko Matsuoka +1 more | 2005-05-17 |
| 6888959 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2005-05-03 |
| 6731384 | Apparatus for detecting foreign particle and defect and the same method | Minori Noguchi, Hidetoshi Nishiyama, Kenji Mitomo, Takashi Okawa, Akira Hamamatsu +1 more | 2004-05-04 |
| 6650409 | Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system | Minori Noguchi, Yukio Kembo, Hiroshi Morioka, Hidetoshi Nishiyama, Hideaki Doi +6 more | 2003-11-18 |
| 6597448 | Apparatus and method of inspecting foreign particle or defect on a sample | Hidetoshi Nishiyama, Minori Noguchi, Tetsuya Watanabe, Hisato Nakamura, Takahiro Jingu +3 more | 2003-07-22 |
| 6411377 | Optical apparatus for defect and particle size inspection | Minori Noguchi, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2002-06-25 |
| 5463459 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yukio Kembo, Hidetoshi Nishiyama, Kazuhiko Matsuoka +1 more | 1995-10-31 |
| 5274434 | Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line | Hiroshi Morioka, Minori Noguchi, Yukio Kembo, Yuzo Taniguchi | 1993-12-28 |
| 5233191 | Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process | Minori Noguchi, Yukio Kembo, Hiroshi Morioka, Hiroshi Yamaguchi, Makiko Kohno | 1993-08-03 |
| 5225886 | Method of and apparatus for detecting foreign substances | Mitsuyoshi Koizumi | 1993-07-06 |
| 5135303 | Method of and apparatus for inspecting surface defects | Sachio Uto | 1992-08-04 |
| 4922308 | Method of and apparatus for detecting foreign substance | Minori Noguchi, Mitsuyoshi Koizumi, Hiroaki Shishido, Sachio Uto | 1990-05-01 |
| 4814596 | Detection of surface particles by dual semiconductor lasers having stable illumination intensities | Mitsuyoshi Koizumi | 1989-03-21 |
| 4740079 | Method of and apparatus for detecting foreign substances | Mitsuyoshi Koizumi, Minoru Tanaka | 1988-04-26 |