Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8949043 | Surface inspecting apparatus and method for calibrating same | Kenji Oka, Kenichiro Komeda | 2015-02-03 |
| 8804108 | Inspection method and inspection apparatus | Kenji Oka | 2014-08-12 |
| 7864310 | Surface inspection method and surface inspection apparatus | Takashi Okawa | 2011-01-04 |
| 7616299 | Surface inspection method and surface inspection apparatus | Takashi Okawa | 2009-11-10 |
| 6798504 | Apparatus and method for inspecting surface of semiconductor wafer or the like | Tatsuya Sato, Yuichiro Kato | 2004-09-28 |
| 6731384 | Apparatus for detecting foreign particle and defect and the same method | Yoshimasa Ohshima, Minori Noguchi, Hidetoshi Nishiyama, Takashi Okawa, Akira Hamamatsu +1 more | 2004-05-04 |