Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4614430 | Method of detecting pattern defect and its apparatus | Yasuhiko Hara, Satoru Fushimi, Hiroshi Makihira | 1986-09-30 |
| 4460273 | Test apparatus for defects of plate | Mitsuyoshi Koizumi, Nobuyuki Akiyama | 1984-07-17 |
| 4433235 | Focusing position detecting device in optical magnifying and observing apparatus | Nobuyuki Akiyama, Mitsuyoshi Koizumi | 1984-02-21 |